Chevalier, XavierXavierChevalierCorreia, Cindy GomezCindy GomezCorreiaPound-Lana, GwenaelleGwenaellePound-LanaBezard, PhilippePhilippeBezardSerege, MatthieuMatthieuSeregePetit-Etienne, CamilleCamillePetit-EtienneGay, GuillaumeGuillaumeGayCunge, GillesGillesCungeCabannes-Boue, BenjaminBenjaminCabannes-BoueNicolet, CeliaCeliaNicoletNavarro, ChristopheChristopheNavarroCayrefourcq, IanIanCayrefourcqMueller, MarcusMarcusMuellerHadziioannou, GeorgesGeorgesHadziioannouIliopoulos, IliasIliasIliopoulosFleury, GuillaumeGuillaumeFleuryZelsmann, MarcMarcZelsmann2023-08-082023-06-202023-08-082021978-1-5106-4057-30277-786XWOS:000844537900016https://imec-publications.be/handle/20.500.12860/41799Top-coats for scalable Nano-manufacturing with High-chi Block Copolymers in Lithographic ApplicationsProceedings paper10.1117/12.2583717978-1-5106-4058-0WOS:000844537900016