Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solution

Souriau, LaurentLaurentSouriauAtanasova, TanyaTanyaAtanasovaTerzieva, ValentinaValentinaTerzievaMoussa, AlainAlainMoussaCaymax, MattyMattyCaymaxLoo, RogerRogerLooMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/14502Characterization of threading dislocations in thin germanium layers by defect etching: towards chromium and HF free solutionJournal article