Armini, SilviaSilviaArminiVerdonck, PatrickPatrickVerdonckLoyo Prado, JanaJanaLoyo PradoKrishtab, MikhailMikhailKrishtabSwerts, JohanJohanSwertsCiofi, IvanIvanCiofiMeerschaut, JohanJohanMeerschautKim, Tae-GonTae-GonKimAdelmann, ChristophChristophAdelmannLe Quoc, ToanToanLe QuocVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabieLeunissen, PeterPeterLeunissenBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18490Pore sealing of porous low-k films by SAMs for ALDOral presentationhttp://www2.imec.be/be_en/education/conferences/ald-workshop.html