Wu, Ming FangMing FangWuVantomme, AndreAndreVantommeHogg, S.S.HoggLangouche, G.G.LangoucheVan der Stricht, WimWimVan der StrichtJacobs, KoenKoenJacobsMoerman, IngridIngridMoerman2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5846Rutherford backscattering/channeling study of a thin AlGaN layer on Al2O03(0001)Journal article