Effects of low-thermal-budget treatments on the porous Si material properties

Stalmans, LievenLievenStalmansPoortmans, JefJefPoortmansBender, HugoHugoBenderJin, S.S.JinConard, ThierryThierryConardNijs, JohanJohanNijsDebarge, L.L.DebargeSlaoui, A.A.Slaoui2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4767Effects of low-thermal-budget treatments on the porous Si material propertiesJournal article