Fujikawa, MakotoMakotoFujikawade Marneffe, Jean-FrancoisJean-Francoisde MarneffeChanson, RomainRomainChansonBabaei Gavan, KhashayarKhashayarBabaei GavanRezvanov, AskarAskarRezvanovLazzarino, FredericFredericLazzarinoTokei, ZsoltZsoltTokeiYamaguchi, T.T.YamaguchiNozawa, N.N.NozawaSato, NagisaNagisaSato2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30733Gas phase pore stuffing for the protection of organo-silicate glass dielectric materialsProceedings paperhttps://ieeexplore.ieee.org/document/8651158