Horiguchi, NaotoNaotoHoriguchiMilenin, AlexeyAlexeyMileninTao, ZhengZhengTaoHody, HubertHubertHodyAltamirano Sanchez, EfrainEfrainAltamirano SanchezVeloso, AnabelaAnabelaVelosoWitters, LiesbethLiesbethWittersWaldron, NiamhNiamhWaldronRagnarsson, Lars-AkeLars-AkeRagnarssonKim, Min-SooMin-SooKimKikuchi, YoshiakiYoshiakiKikuchiMertens, HansHansMertensRaghavan, PraveenPraveenRaghavanPiumi, DanieleDanielePiumiCollaert, NadineNadineCollaertBarla, KathyKathyBarlaThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26735Patterning challenges in advanced device architectures: FinFETs to nanowireProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2506645