Low temperature catalytic chemical vapour synthesis of Cu3Ge thin films for interconnect applications

Peter, AntonyAntonyPeterWen, Liang GongLiang GongWenCarbonell, LaureLaureCarbonellSchaekers, MarcMarcSchaekersTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22925Low temperature catalytic chemical vapour synthesis of Cu3Ge thin films for interconnect applicationsMeeting abstract