Lin, DennisDennisLinWang, Wei-EWei-EWangBrammertz, GuyGuyBrammertzMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14042Inversion behavior on n and p type ALD - Al2O3/In0.53Ga0.47As MOS capacitorsMeeting abstractAbstract book IEEE SISC