Decoster, StefanStefanDecosterPiao, XiaoyuXiaoyuPiaoGillijns, WernerWernerGillijnsLazzarino, FredericFredericLazzarino2021-10-252021-10-2520181071-1023https://imec-publications.be/handle/20.500.12860/30574Modeling the topography of uneven substrates post spin-coatingJournal articlehttps://doi.org/10.1116/1.5022166