Mannaert, GeertGeertMannaertParaschiv, VasileVasileParaschivDe Jaeger, BriceBriceDe JaegerVan Hove, MarleenMarleenVan HoveDemand, MarcMarcDemandDecoutere, StefaanStefaanDecoutereBoullart, WernerWernerBoullart2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21092Development of AlGaN recess etch for Emode POWER HEMTsMeeting abstract