Xu, XiuMeiXiuMeiXuVrancken, NandiNandiVranckenVereecke, GuyGuyVereeckeSuhard, SamuelSamuelSuhardPourtois, GeoffreyGeoffreyPourtoisHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27619Some critical issues in pattern collapse prevention and repairProceedings paperhttp://www.scientific.net/SSP.255.147