Witvrouw, AnnAnnWitvrouwFlinn, P. A.P. A.FlinnMaex, KarenKarenMaex2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1660The effect of the passivation material on the stress and stress relaxation behaviour of narrow Al-Si-Cu linesProceedings paper