Cheap virtual germanium substrates by CSVT deposition on porous silicon

Flamand, GiovanniGiovanniFlamandDegroote, StefanStefanDegrooteDessein, KristofKristofDesseinPoortmans, JefJefPoortmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10452Cheap virtual germanium substrates by CSVT deposition on porous siliconProceedings paper