Scaling of Back End of Line Processing : opportunities and challenges

Verdonck, PatrickPatrickVerdonckWilson, ChrisChrisWilsonRonse, KurtKurtRonseWen, Liang GongLiang GongWenArmini, SilviaSilviaArmini2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27521Scaling of Back End of Line Processing : opportunities and challengesMeeting abstracthttp://www.ccs.unicamp.br/seminatec/wp-content/uploads/2016/02/BEOLscalingabstractVs4_Verdonck.pdf