Large-area compatible fabrication and optimization of micropump aided by vorticity-based algorithm

Liang, BoshenBoshenLiangHeremans, PaulPaulHeremansCheyns, DavidDavidCheyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33441Large-area compatible fabrication and optimization of micropump aided by vorticity-based algorithmProceedings paper