In-depth static and low-frequency noise characterization of n-channel FinFETs on SOI substrates at cryogenic temperature

Achour, H.H.AchourCretu, BogdanBogdanCretuRoutoure, Jean-MarcJean-MarcRoutoureCarin, RegisRegisCarinTalmat, RachidaRachidaTalmatBenfdila, A.A.BenfdilaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-222021-10-2220140038-1101https://imec-publications.be/handle/20.500.12860/23466In-depth static and low-frequency noise characterization of n-channel FinFETs on SOI substrates at cryogenic temperatureJournal articlehttp://www.sciencedirect.com/science/article/pii/S0038110114000495