Probing the intrinsic limitations of the contact resistance of metal/semiconductor interfaces through atomistic simulations

Pourtois, GeoffreyGeoffreyPourtoisDabral, AshishAshishDabralSankaran, KiroubanandKiroubanandSankaranMagnus, WimWimMagnusYu, HaoHaoYude Jamblinne de Meux, AlbertAlbertde Jamblinne de MeuxLu, AugustinAugustinLuClima, SergiuSergiuClimaStokbro, KurtKurtStokbroSchaekers, MarcMarcSchaekersHoussa, MichelMichelHoussaCollaert, NadineNadineCollaertHoriguchi, NaotoNaotoHoriguchi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29210Probing the intrinsic limitations of the contact resistance of metal/semiconductor interfaces through atomistic simulationsProceedings paperhttp://ecst.ecsdl.org/content/80/1/303.abstract