Leonov, VladimirVladimirLeonovVullers, RuudRuudVullersGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan Andel2021-10-172021-10-172008-06https://imec-publications.be/handle/20.500.12860/14011Self-supported and membrane-supported bulk-micromachined thermopiles for energy scavengersProceedings paper