Rochus, VeroniqueVeroniqueRochusWang, BoBoWangRay Chaudhuri, AsheshAsheshRay ChaudhuriHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriRottenberg, XavierXavierRottenberg2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25829Fast analytical design of poly-SiGe MEMS pressure sensorsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7103163