Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenSchulze, AndreasAndreasSchulzeKambham, Ajay KumarAjay KumarKambhamKoelling, SebastianSebastianKoellingGilbert, MatthieuMatthieuGilbert2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18222Counting dopants/atoms in 2D/3D nanoscale structuresOral presentation