De Coster, WalterWalterDe CosterBrijs, BertBertBrijsElst, KathyKathyElstVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/104In situ observation of compound formation and ion beam mixingProceedings paper