Selvaraja, ShankarShankarSelvarajaDe Vos, KatrienKatrienDe VosBogaerts, WimWimBogaertsBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16195Effect of device density on the uniformity of silicon nano-photonic waveguide devicesProceedings paper