Reliability and retention of 1T-RAM cell capacitor less on UTBOX SOI substrates

Aoulaiche, MarcMarcAoulaicheCollaert, NadineNadineCollaertSimoen, EddyEddySimoenMercha, AbdelkarimAbdelkarimMerchaDe Wachter, BartBartDe WachterBourdelle, K.K.K.K.BourdelleNguyen, B.-Y.B.-Y.NguyenBoedt, F.F.BoedtDelprat, D.D.DelpratJurczak, GosiaGosiaJurczakAltimime, LaithLaithAltimime2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16657Reliability and retention of 1T-RAM cell capacitor less on UTBOX SOI substratesProceedings paper