A simple copper based plating process resulting in efficiencies above 20.5% using pilot processing equipment

Tous, LoicLoicTousRussell, RichardRichardRussellBeckers, JohanJohanBeckersBertens, JurgenJurgenBertensCornagliotti, EmanueleEmanueleCornagliottiChoulat, PatrickPatrickChoulatJohn, JoachimJoachimJohnDuerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23184A simple copper based plating process resulting in efficiencies above 20.5% using pilot processing equipmentProceedings paper