Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Scheerlinck, StijnStijnScheerlinckSchrauwen, JonathanJonathanSchrauwenVan Laere, FrederikFrederikVan LaereTaillaert, DirkDirkTaillaertVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/12848Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguidesJournal article