Lorusso, GianGianLorussoGoethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereHermans, JanJanHermansRonse, KurtKurtRonseMyers, AlanAlanMyersKim, In SungIn SungKimNiroomand, ArdavanArdavanNiroomandIwamoto, FumioFumioIwamotoRitter, D.D.Ritter2021-10-162021-10-162007-11https://imec-publications.be/handle/20.500.12860/12515EUVL at IMEC: shadowing compensation and Flare mitigationJournal article