ALD on high mobility channels: engineering the proper gate stack passivation

Sioncke, SonjaSonjaSionckeLin, Hang ChunHang ChunLinAdelmann, ChristophChristophAdelmannBrammertz, GuyGuyBrammertzDelabie, AnneliesAnneliesDelabieConard, ThierryThierryConardFranquet, AlexisAlexisFranquetCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsFleischmann, ClaudiaClaudiaFleischmannTemst, K.K.TemstVantomme, AndreAndreVantommeMuller, MatthiasMatthiasMullerKolbe, MichaelMichaelKolbeBeckhoff, BurkhardBurkhardBeckhoffSchmeisser, DieterDieterSchmeisserTallarida, MassimoMassimoTallarida2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17997ALD on high mobility channels: engineering the proper gate stack passivationProceedings paper