Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substrates

Jiang, SijiaSijiaJiangMerckling, ClementClementMercklingWaldron, NiamhNiamhWaldronVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20868Influence of chemical treatments on selective epitaxial growth of InP in STI nano-trenches on Si (001) substratesMeeting abstract