High resolution analysis of high concentration dopant profiles

Koelling, SebastianSebastianKoellingZschaetzsch, GerdGerdZschaetzschDouhard, BastienBastienDouhardKimura, KKKimuraBuyuklimanli, T.T.BuyuklimanliVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19193High resolution analysis of high concentration dopant profilesOral presentation