Simoen, EddyEddySimoenBargallo Gonzalez, MireiaMireiaBargallo GonzalezVissouvanadin Soubaretty, BertrandBertrandVissouvanadin SoubarettyChowdhury, Mohammad KamruzzamanMohammad KamruzzamanChowdhuryVerheyen, PeterPeterVerheyenHikavyy, AndriyAndriyHikavyyBender, HugoHugoBenderLoo, RogerRogerLooClaeys, CorCorClaeysMachkaoutsan, VladimirVladimirMachkaoutsanTomasini, P.P.TomasiniThomas, S.S.ThomasLu, J.P.J.P.LuWeijtmans, J.W.J.W.WeijtmansWise, R.R.Wise2021-10-172021-10-1720080018-9383https://imec-publications.be/handle/20.500.12860/14467Factors influencing the leakage current in embedded SiGe source/drain junctionsJournal article