Prewett, P. D.P. D.PrewettMartin, B.B.MartinWatson, J. G.J. G.WatsonJonckheere, RikRikJonckheere2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/302Effects on IC quality of 5X reticle repair using FIB with stain reductionProceedings paper