Damage clustering and damage-size distributions after megasonic cleaning

De Marco, CinziaCinziaDe MarcoWostyn, KurtKurtWostynBearda, TwanTwanBeardaSano, Ken-IchiKen-IchiSanoKenis, KarineKarineKenisJanssens, TomTomJanssensLeunissen, PeterPeterLeunissenEitoku, AtsuroAtsuroEitokuMertens, PaulPaulMertens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11955Damage clustering and damage-size distributions after megasonic cleaningProceedings paper