Abrenica, GranielGranielAbrenicaLebedev, MikhailMikhailLebedevPacco, AntoineAntoinePaccoCalvet, WolframWolframCalvetMayer, ThomasThomasMayervan Dorp, DennisDennisvan Dorp2021-10-272021-10-2720191359-7345https://imec-publications.be/handle/20.500.12860/32402Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of conceptJournal articlehttps://pubs.rsc.org/en/content/articlelanding/2019/cc/c9cc05376j#!divAbstract