Defect formation in III-V fin grown by aspect ratio trapping technique: a first-principles study

Minari, HidekiHidekiMinariYoshida, ShinichiShinichiYoshidaSawada, KenKenSawadaNakazawa, MasashiMasashiNakazawaPourtois, GeoffreyGeoffreyPourtoisMerckling, ClementClementMercklingWaldron, NiamhNiamhWaldronGuo, WeimingWeimingGuoJiang, SijiaSijiaJiangCollaert, NadineNadineCollaertSimoen, EddyEddySimoenLin, DennisDennisLinCaymax, MattyMattyCaymax2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24255Defect formation in III-V fin grown by aspect ratio trapping technique: a first-principles studyProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6861166&openedRefinements%3D*%26filter%3DAND(NOT(4283010803))%26p