Maes, JanJanMaesSwerts, JohanJohanSwertsPierreux, DieterDieterPierreuxMachkaoutsan, VladimirVladimirMachkaoutsanMarcus, StevenStevenMarcusMilligan, BrennanBrennanMilliganSchram, TomTomSchramRagnarsson, Lars-AkeLars-AkeRagnarssonCacciato, AntonioAntonioCacciatoRohr, ErikaErikaRohrRothschild, AudeAudeRothschildHendrickx, PaulPaulHendrickxBreuil, LaurentLaurentBreuilVan den Bosch, GeertGeertVan den Bosch2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15782Band edge work function metal gates using PEALD TaCN electrodesOral presentation