Wet-chemical etching of III-V semiconductors: towards atomic-layer-scale processing

van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsKelly, JohnJohnKellyHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34210Wet-chemical etching of III-V semiconductors: towards atomic-layer-scale processingMeeting abstracthttp://ma.ecsdl.org/content/MA2019-01/24/1227.abstract