Atanasova, TanyaTanyaAtanasovaStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14917Physicochemical mechanism of damascene copper plating: effect of suppressorMeeting abstracthttp://ecsmeet6.peerx-press.org/jsp/mas/reportSymposiumList.jsp