Low Weibull slope of breakdown distributions in high-k layers

Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveCartier, EduardEduardCartierSoens, CharlotteCharlotteSoensGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5392Low Weibull slope of breakdown distributions in high-k layersOral presentation