Rapid thermal processing of conventionally and electromagnetically cast 100 cm2 multicrystalline silicon

Sivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanLaureys, WimWimLaureysDe Schepper, PatrickPatrickDe SchepperNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1499Rapid thermal processing of conventionally and electromagnetically cast 100 cm2 multicrystalline siliconProceedings paper