Qualification of electrical linewidth measurements (ELM) as a metrology tool for 0.18μm and below

Marschner, ThomasThomasMarschnerPollentier, IvanIvanPollentierBaerts, ChristinaChristinaBaertsBoltz, IngoIngoBoltzRonse, KurtKurtRonseVan den hove, LucLucVan den hoveFinders, JoJoFindersGangala, Hareen KHareen KGangalaCapodieci, LuigiLuigiCapodieci2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2752Qualification of electrical linewidth measurements (ELM) as a metrology tool for 0.18μm and belowProceedings paper