Bekaert, JoostJoostBekaertVan Look, LieveLieveVan LookVandenberghe, GeertGeertVandenbergheVan Adrichem, PaulPaulVan AdrichemMaslow, Mark J.Mark J.MaslowGemmink, Jan-WillemJan-WillemGemminkCao, HuaHuaCaoHunsche, StefanStefanHunscheNeumann, Jens TimoJens TimoNeumannWolf, AlexanderAlexanderWolf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18542Characterization and control of dynamic lens heating effects under high-volume manufacturing conditionsProceedings paper