FIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structures

Bender, HugoHugoBenderVan Marcke, PieterPieterVan MarckeDrijbooms, ChrisChrisDrijboomsRoussel, PhilippePhilippeRoussel2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1728FIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structuresOral presentation