Nuytten, ThomasThomasNuyttenBogdanowicz, JanuszJanuszBogdanowiczWitters, LiesbethLiesbethWittersEneman, GeertGeertEnemanHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31435Raman stress measurements at the nanoscaleMeeting abstracthttp://ma.ecsdl.org/content/MA2018-02/31/1058