Demonstration of lithium niobate integration on a 200-mm silicon photonics wafer using transfer printing

Niels, MargotMargotNielsVissers, EwoudEwoudVissersVanackere, TomTomVanackereMoerman, ArnoArnoMoermanGuo, XinXinGuoGeerinck, PeterPeterGeerinckSoltanian, EmadrezaEmadrezaSoltanianZhang, JingJingZhangJanssen, SofieSofieJanssenVerheyen, PeterPeterVerheyenSingh, NehaNehaSinghBode, DieterDieterBodeDavi, MartinMartinDaviFerraro, FilippoFilippoFerraroAbsil, PhilippePhilippeAbsilBalakrishnan, SadhishkumarSadhishkumarBalakrishnanVan Campenhout, JorisJorisVan CampenhoutHaensch, SebastianSebastianHaenschMai, HanhHanhMaiSingh, NishantNishantSinghRoelkens, GuentherGuentherRoelkensUvin, SarahSarahUvinBillet, MaximilienMaximilienBilletKuyken, BartBartKuyken2025-08-252025-08-252025-AUG 10146-9592WOS:001551093100003https://imec-publications.be/handle/20.500.12860/46109Demonstration of lithium niobate integration on a 200-mm silicon photonics wafer using transfer printingJournal article10.1364/OL.564405WOS:001551093100003MACH-ZEHNDER MODULATORMEDLINE:40751964