Gonzalez, PilarPilarGonzalezGuo, BinBinGuoVarela Pedreira, OlallaOlallaVarela PedreiraSeveri, SimoneSimoneSeveriDe Meyer, KristinKristinDe MeyerWitvrouw, AnnAnnWitvrouw2021-10-192021-10-1920110960-1317https://imec-publications.be/handle/20.500.12860/18980Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applicationsJournal article10.1088/0960-1317/21/11/115019