Lauwers, AnneAnneLauwersLindsay, RichardRichardLindsayHenson, KirklenKirklenHensonSeveri, SimoneSimoneSeveriAkheyar, AmalAmalAkheyarPawlak, BartekBartekPawlakde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9184Ni-silicided deep source/drain junctions formed by solid phase epitaxial regrowthProceedings paper