Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

Tokei, ZsoltZsoltTokeiMc Inerney, DavidDavidMc InerneyBaklanov, MikhaïlMikhaïlBaklanovBeyer, GeraldGeraldBeyerMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5714Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitationsProceedings paper