Material studies on Si:C epitaxial films grown by CVD

Dhayalan, Sathish KumarSathish KumarDhayalanLoo, RogerRogerLooRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyShimura, YosukeYosukeShimuraNuytten, ThomasThomasNuyttenRichard, OlivierOlivierRichardBender, HugoHugoBenderDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014-10https://imec-publications.be/handle/20.500.12860/23766Material studies on Si:C epitaxial films grown by CVDProceedings paperhttp://ecst.ecsdl.org/content/64/6/997.abstract