Analysis of zero-temperature coefficient behavior on vertically stacked double nanosheet nMOS devices

Coelho, Carlos H. S.Carlos H. S.CoelhoMartino, Joao A.Joao A.MartinoBellodi, MarcelloMarcelloBellodiSimoen, EddyEddySimoenVeloso, AnabelaAnabelaVelosoAgopian, Paula G. D.Paula G. D.Agopian2022-03-072022-03-0720210026-2692WOS:000704949900006https://imec-publications.be/handle/20.500.12860/39334Analysis of zero-temperature coefficient behavior on vertically stacked double nanosheet nMOS devicesJournal article10.1016/j.mejo.2021.105277WOS:000704949900006DEGRADATIONPOINTMOBILITY